I've noticed that the eraser part of the pen is what causes it (for me anyway). You need to press down on it to activate it, and that seems to encourage more pressure than needed. And if there is any grit on the screen, well.... scritch scratch.
The eraser end of my stylus is also scratched up.
I'm also using this pen now - needs calibration though -
https://www.staedtler.com/en/noris-digital/