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According to 10 Words Coined in the Sci-Fi Universe,
"Nanites, or tiny robots built on the small scale, were a concept first realized in science fiction and later researched by scientists in the hopes of making these minute robots a reality. Sometimes called nanomachines, nanorobots, or nanobots, these robots will one day have many real-life applications, including targeted drug delivery in patients with cancer. Perhaps one of the first science fiction writers to imagine nanotechnology was Nikolai Leskov, whose 1881 story described imperceptible robots, requiring 5,000,000 times magnification to be seen.
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